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SW-TRACER

Name:	SW-TRACER
Location:	CEITEC Vysoké učení technické v Brně
Instrument description:	TRACER software simulates a Point Spread Function (PSF) which is essential input for any type of Proximity / Process Effect Correction or e-beam simulation and defines the deposited energy as a function of the distance from the incident beam. One can think of it as the convolution of electron scattering, beam size (or beam blur), and process effects. It offers an easy to use interface for defining the parameters (material data, stack parameters, acceleration voltage), running the Monte Carlo simulation, visualization of r-z simulation results (energy spread at different resist thicknesses), and the extraction of the 1D Point Spread Function which can be used for Proximity Effect Correction (PEC). In addition, the tool contributions such as spot size and process blurs such as diffusion need to be quantified and factored in.
Research group:	CF: CEITEC Nano

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