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Semi-automated 4-probe system Cascade Microtech SUMMIT 12000

Name:	Semi-automated 4-probe system Cascade Microtech SUMMIT 12000
Technology / Methodology:	Electrical & Magnetic measurements
Location:	CEITEC Vysoké učení technické v Brně
Instrument description:	SUMMIT Semi-automated probe station is precise on-wafer device and process characterization system. This test instruments allows measuring of semiconductor structures on wafers up to 200mm diameter. System is designed for RF/Microwave application, device characterization, wafer level reliability and special e-tests. Probe system has EMI shielding for low noise measurement, DC, RF mmW, FA, WLR and more configurations of measuring.
Research group:	CF: CEITEC Nano

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