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Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660

Name:	Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660
Location:	CEITEC Vysoké učení technické v Brně
Instrument description:	FIB/SEM with sub-nm resolution, capable of imaging at very low landing energies of primary electrons (of the order of tens of volts), in-lens detection of SE and BSE, local chemical analysis. Equipped with STEM detector and EDS + EBSD analysers. Ideally suited for TEM lamella preparation and observation. Capable of 3D chemical and crystallographic analysis as well as structure reconstruction.
Research group:	CF: CEITEC Nano

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