+420 54114 9207 | 
nano@ceitec.vutbr.cz
Contact the CEITEC Nano User Office at nano@ceitec.vutbr.cz or via phone +420 54114 9200 to discuss your processing requirements.
The CEITEC Nano financial department will send you a quotation for CEITEC Nano services. If you have any questions regarding invoicing contact CEITEC Nano financial manager Kateřina Tydlačková (+420 51118 1252, katerina.tydlackova@ceitec.vutbr.cz) with your questions.
If you agree with the quotation send the purchase order to nano@ceitec.vutbr.cz
CEITEC Nano staff will process your samples and prepare a processing/measurement report.
Upon agreement an invoice will be emailed to you together with the samples or measurement data.
Valid from 1st May 2018
The prices include full instrument running costs, operator’s wage, instrument depreciation and CEITEC Nano processing fee. Contact CEITEC Nano User Office at nano@ceitec.vutbr.cz for a quotation.
CEITEC Nano pricelist* - full service for Commercial users | |||
|---|---|---|---|
Nanofabrication laboratory | |||
Lihography | CZK/hour | EUR/hour | |
| RAITH | E-beam writer RAITH150 Two | 3 000 | 115 |
| MIRA | Scanning Electron Microscope/E-beam writer TESCAN MIRA3 | 2 210 | 85 |
| DWL | UV Direct Write Laser system Heidelberg Instruments DWL 66-fs | 2 120 | 81 |
| SUSS-MA8 | Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3 | 3 070 | 118 |
| SUSS-WETBENCH | Lithographic wetbench for resist coating SÜSS MicroTec | 2 650 | 102 |
| SUSS-RC8 | Resist coating and development system SÜSS MicroTec RCD8 | 2 460 | 95 |
| LAURELL | Spincoater Laurell WS-650-23B | 2 650 | 102 |
| NANOCALC | Spectroscopic reflectometer Ocean Optics NanoCalc 2000 | 1 970 | 76 |
| DEKTAK | Mechanical profilometer Bruker Dektak XT | 2 190 | 84 |
| DIENER | Resist stripper Diener electronic NANO Plasma cleaner | 2 000 | 77 |
Depositions and etching | CZK/hour | EUR/hour | |
| EVAPORATOR | Electron beam evaporator BESTEC | 3 350 | 129 |
| MAGNETRON | Magnetron sputtering systém BESTEC | 2 940 | 113 |
| ALD | Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200 | 2 780 | 107 |
| XERION | Rapid thermal annealing Xerion XREACT/1 250°C | 2 360 | 91 |
| PECVD-NANOFAB | High temperature PECVD of C-based materials Oxford Instruments Plasma Technology NanoFab | 3 090 | 119 |
| Experimental-PECVD | PECVD with ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe | 3 480 | 134 |
| APCVD | Atmospheric Pressure chemical vapor deposition | 2 630 | 101 |
| LPCVD | Low pressure chemical vapor deposition | 2 630 | 101 |
| MOCVD | Metal organic chemical vapor deposition | 2 980 | 115 |
| PECVD | PECVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100 | 3 480 | 134 |
| DRIE | Deep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100 | 3 030 | 116 |
| SCIA | Ion beam etching Scia Systems Coat 200 | 3 150 | 121 |
| RIE-CHLORINE | Reactive ion etching of III-V semiconductors Oxford Instruments Plasma Technology PlasmaPro 100 | 2 480 | 95 |
| RIE-FLUORINE | RIE of Si-based materials/deposition of thin films Oxford Instruments PlasmaPro NGP 80 | 3 310 | 127 |
Packaging | CZK/hour | EUR/hour | |
| WIRE-BONDER | Wire bonder TPT HB 16 | 1 930 | 74 |
| LASER-DICER | Laser dicer Oxford Lasers A-Series | 2 300 | 88 |
Nanocharacterization laboratory | |||
UHV Technologies | CZK/hour | EUR/hour | |
| SIMS | Secondary Ion Mass Spectroscopy ION-TOF TOF.SIMS5 | 3 900 | 150 |
| KRATOS-XPS | X-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra | 3 900 | 150 |
| NANOSAM | nanoScanning Auger Microscopy Scienta Omicron nanoSAM Lab | 3 900 | 150 |
| UHV-CLUSTER | Ultra High Vacuum Preparation and Analytical System - Custom Deposition Chamber SPECS | 2 600 | 100 |
Microscopy and nanomanipulation | CZK/hour | EUR/hour | |
| LYRA | Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 | 3 300 | 127 |
| ICON-SPM | Scanning Probe Microscope Bruker Dimension Icon | 2 820 | 108 |
| KERR-MICROSCOPE | Magneto-optical Kerr microscope | 2 390 | 92 |
| NANOINDENTOR | Hysitron TI 950 | 3 000 | 115 |
Optical measurements | CZK/hour | EUR/hour | |
| FTIR | Vacuum FTIR Vertex80v + microscope Hyperion 3000 KIT | 3 350 | 129 |
| WOOLLAM-VIS | NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE | 2 400 | 92 |
| WOOLLAM-MIR | MIR spectroscopic ellipsometer J. A. Woollam IR-VASE | 2 530 | 97 |
| VUVAS | Vacuum ultraviolet spectrometer McPherson VUVAS 1000 | 2 210 | 85 |
| NIRQUEST512 | NIR Optical Spectrometer Ocean Optics NIRQuest 512 | 2 160 | 83 |
| JAZ3 | UV-VIS Optical Spectrometer Ocean Optics JAZ 3-channel | 2 160 | 83 |
| SNOM-NANONICS | Scanning Near-field Optical Microscopy Nanonics Imaging MV 4000 | 3 070 | 118 |
| TERS | Scanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II | 2 890 | 111 |
Electrical and magnetic measurements | CZK/hour | EUR/hour | |
| SUMMIT | Semi-automated 4-probe system Cascade Microtech SUMMIT 12000 | 2 820 | 108 |
| MPS150 | 4-probe station Cascade Microtech MPS 150 | 2 010 | 77 |
| KEITHLEY | Keithley 4200-SCS Parameter Analyzer | 2 010 | 77 |
| LAKESHORE | Low Temperature Electro-Magnetic Properties Measurement System LakeShore CRX-EM-HF | 2 780 | 107 |
| CRYOGENIC | Low Temperature Vibrating Sample Magnetometr Cryogenic Limited | 2 920 | 112 |
Structural analysis laboratory | |||
Electron microscopy | CZK/hour | EUR/hour | |
| TITAN | High resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed | 5 800 | 223 |
| HELIOS | Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660 | 3 900 | 150 |
| VERIOS | High resolution Scanning Electron Microscope FEI Verios 460L | 3 300 | 127 |
Sample preparation | CZK/hour | EUR/hour | |
| STEMI | Stereomicroscope Zeiss Stemi 508 | 1 600 | 62 |
| TENUPOL | TEM electrolytical polisher Tenupol 5 | 1 960 | 75 |
| FISCHIONE-160 | TEM specimen grinding tool Fischione 160 | 1 660 | 64 |
| FISCHIONE-170 | Ultrasonic TEM disc cutter Fischione 170 | 1 760 | 67 |
| CITOVAC | Vacuum impregnation chamber Citovac | 1 670 | 64 |
| LEICACOAT-STAN | Coater Leica EM ACE600 | 1 920 | 74 |
| TIC3X | Cross section/broad beam ion polisher Leica EM TIC3X | 2 370 | 91 |
| FISCHIONE-200 | Dimple grinder Fichione 200 | 1 670 | 64 |
| LECTROPOL | Electrolytical polisher Lectropol 5 | 1 880 | 72 |
| TEGRAMIN | Grinder/polisher Tegramin 30 | 1 910 | 73 |
| ZEISS-Z1M | Inverted light microscope Zeiss Axio Observer Z1m | 1 770 | 68 |
| FISCHIONE-TEM MILL | Ion polisher Fischione TEM Mill 1050 | 2 570 | 99 |
| LABOTOM5 | Metallographic saw Labotom 5 | 1 970 | 76 |
| CITOPRESS | Mounting press Citopress 10 | 1 630 | 63 |
| PLASMACLEANER | Plasma cleaner Fischione 1020 | 2 060 | 79 |
| SAW-ACCUTOM | Precision saw Accutom 100 | 2 020 | 78 |
| LEICACOAT-NANO | High vacuum coating system for electron microscopy Leica Microsystems EM ACE 600 | 2 020 | 78 |
X-ray diffractometry | CZK/hour | EUR/hour | |
| RIGAKU9 | X-ray diffractometer with high brightness source Rigaku SmartLab 9kW | 2 960 | 114 |
| RIGAKU3 | X-ray powder diffractometer Rigaku SmartLab 3kW | 2 600 | 100 |
Micro & Nano X-ray CT laboratory | CZK/hour | EUR/hour | |
| microCT | microCT GE phoenix v|tome|x L240 | 3 750 | 144 |
| nanoCT | nanoCT Rigaku nano3DX | 2 640 | 102 |
Laser Spectroscopy laboratory | CZK/hour | EUR/hour | |
| LIBS | Laser-Induced Breakdown Spectroscopy | 2 500 | 96 |
*Prices without VAT
Prices in EUR are approximate at the rate of 26 CZK = 1 EUR
Commercial users typically order measurement/nanofabrication services and their samples are processed by CEITEC Nano staff. They can be present at the measurement as visitors under the supervision of authorized personnel.
If required, self-service access to all CEITEC Nano equipment is available also to commercial users. Commercial users pay a User fee (30,000 CZK/year) plus they pay an hourly charge which includes full instrument running costs, instrument depreciation and CEITEC Nano training and processing fees. See full CEITEC Nano price list.
Please contact us at nano@ceitec.vutbr.cz to discuss your individual needs and pricing.
