For occasional users, where training is unfeasible, full-service processing of user’s samples can be provided by CEITEC Nano staff. Full-service users do not not need any training, their samples are handled by CEITEC Nano staff. They can be present at the measurement only as visitors under the supervision of an authorized personnel.
Academic users using full-service pay hourly rates (listed below) for the instrument use and an additional fee for the analysis of the results (if requested).
Lithography | CZK/hour |
E-beam writer RAITH RAITH150 Two | 1 500 |
Scanning Electron Microscope/E-beam writer TESCAN MIRA3 | 1 300 |
UV Direct Write Laser system Heidelberg Instruments DWL 66-fs | 1 300 |
Other lithography equipment | 1 200 |
Etching and deposition | CZK/hour |
Reactive ion etching system Oxford Instruments PlasmaPro NGP 80 | 1 200 |
Ion beam etching Scia Systems Coat 200 | 1 200 |
Atomic layer deposition system Ultratech Fiji 200 | 1 000 |
Electron beam evaporator BESTEC | 1 000 |
UHV magnetron sputtering system BESTEC | 1 000 |
Packaging | CZK/hour |
Laser wafer dicer Oxford Lasers A-Series | 1 200 |
Wire bonder TPT HB 16 | 1 000 |
UHV technologies | CZK/hour |
Scanning Auger Microscopy Scienta Omicron nanoSAM Lab | 1 800 |
Secondary Ion Mass Spectroscopy ION-TOF TOF.SIMS5 | 1 800 |
Low Energy Ion Spectroscopy ION-TOF Qtac 100 | 1 300 |
X-ray photoelectron spectroscopy Kratos Axis Supra | 1 800 |
Microscopy and nanomanipulation | CZK/hour |
Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 1 200 | 1 500 |
Scanning Probe Microscope Bruker Dimension Icon | 1 300 |
Optical measurements | CZK/hour |
MIR spectroscopic ellipsometer J. A. Woollam IR-VASE | 1 200 |
NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE | 1 200 |
SPM + microRaman NT-MDT Ntegra Spectra + Solar II | 1 200 |
Vacuum FTIR, IR microscope Bruker Vertex80v + Hyperion | 1 200 |
Vacuum ultraviolet spectrometer McPherson VUVAS 1000 | 1 200 |
Electrical and magnetic measurements | CZK/hour |
Low temperature measurement system Cryogenic mini-CFMS | 1 200 |
Low temperature measurement system LakeShore CRX-EM-HF | 1 200 |
4-probe station Cascade Microtech MPS 150 | 1 200 |
Semi-automated 4-probe system Cascade Microtech SUMMIT 12000 | 1 200 |
Electron microscopy | CZK/hour |
High resolution Scanning Electron Microscope FEI Verios 460L 1 400 | 1 900 |
Dual beam FEI Helios NanoLab 660 1 700 | 2 000 |
HRTEM FEI Titan Themis 60-300 cubed 2 700 | 3 000 |
Sample preparation 1 000 | 1 200 |
X-ray diffractometry | CZK/hour |
X-ray diffractometer with high brightness source Rigaku SmartLab 9kW | 1 200 |
X-ray powder diffractometer Rigaku SmartLab 3kW | 1 200 |
micro & nano CT | CZK/hour |
---|---|
microCT GE phoenix L 240, GE phoenix M 300 | 2 200 |
nanoCT Rigaku Nano3DX | 3 000 |