+420 54114 9207 | 
nano@ceitec.vutbr.cz
CEITEC Nano Main Building
CEITEC Nano Users
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| Optical lithography lab. - Mask Aligner Suess MA8 | Optical lithography lab. - Automatic Coater/Developer Suess RCD8 |
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| Electron beam lithography - Tescan Mira3 and Raith 150 two | Laser Writer Heidelberg Instruments DWL66 |
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| PVD Lab. - Bestec Magnetron Sputtering System | PVD Lab. - Bestec E-beam Evaporator |
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| Dry Etching & CVD Lab. - Scia Mill Ion Beam Etching System | Dry Etching & CVD Lab. - SVCS LPCVD Furnaces |
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| Optical Lab. - J. A. Woolam Spectroscopic Ellipsometer | Optical Lab. - Bruker Vertex FTIR spectometer/microscope |
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| UHV Lab. - ScientaOmicron Scanning Auger Microscope | FIB Lab. - FIB/SEM system Tescan Lyra3 |
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| Coffee Room | Coffee Room and Self Service Food Shop (Lesní bar) |
