Training for equipment is available for registered users via the booking system .
Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
Coater Leica EM ACE600
E-beam writer RAITH150 Two (RAITH)
Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660
Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3
Grinder/polisher Tegramin 30
High resolution Scanning Electron Microscope FEI Verios 460L
Hysitron TI 950 (NANOINDENTER)
Keithley 4200-SCS Parameter Analyzer (KEITHLEY-4200)
Lithographic wet bench development Stroza & Lithographic wetbench for stripping Stroza
Lithographic wet bench for resist coating SÜSS MicroTec
Mechanical profilometer Bruker Dektak XT
Metallographic saw Labotom 5
Mini Cryogen-Free Magnet System - Cryogenic Limited (CRYOGENIC)
MIR spectroscopic ellipsometer J. A. Woollam IR-VASE
Mask Aligner SÜSS MicroTec MA8 (SUSS-MA8)
Mounting press Citopress 10
NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE
Optical microscope Olympus MX51
Precision saw Accutom 100
Resist stripper Diener electronic NANO Plasma cleaner
Scanning Electron Microscope/E-beam writer TESCAN MIRA3
Scanning Near-field Optical Microscopy Nanonics Imaging MV 4000
Scanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II
Scanning Probe Microscope Bruker Dimension Icon
Spectroscopic reflectometer Ocean Optics NanoCalc 2000
UV Direct Write Laser system Heidelberg Instruments DWL 66-fs
Vacuum FTIR Vertex80v + microscope Hyperion 3000 KIT - polarizors, VIS detector Bruker Vertex80v + Hyperion 3000
Vacuum ultraviolet spectrometer McPherson VUVAS 1000
Wire bonder TPT HB 16
X-ray diffractometer with high brightness source Rigaku SmartLab 9kW
X-ray powder diffractometer Rigaku SmartLab 3kW
X-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra (KRATOS-XPS)